Chapter 126 Improvement Plan
  Plans are plans, and the equipment that needs to be dismantled still has to be dismantled.

However, Kangchi does not need to dismantle it very piecemeal. It only needs to separate a few modules.

Anyway, if the shell of this thing is removed, no one can recognize what it is.

Due to the heavy workload, Kang Chi could only stay in Dongyang for one more week.
  At the same time, while taking a break from dismantling, he also took the time to look at the EUV design drawings of Chang Chunguang Institute, and he almost understood them thoroughly.

Among the EUV light sources of lithography machines, there are two relatively mature and reliable solutions, namely DPP and LPP solutions.

In fact, the principles of these two solutions are similar. They use the process of converting tin into plasma to release extreme ultraviolet light.
  The only difference is that DPP is activated by electric shock to tin, while LPP is activated by secondary laser attack on tin liquid.

According to the consistent style of China, naturally everyone will try everything.

Therefore, these two solutions are currently being developed by the Changchun Institute of Light and the Modou Institute of Light respectively.

Among them, the LPP solution of the Shanghai Institute of Light is actually making the fastest progress. It is said that the power has reached 188W and the conversion efficiency is 3.7%, which is basically ready for practical use.

However, the pulsed high-power carbon dioxide laser required in the LPP solution has still not been conquered. Currently, only M countries and island countries can produce it. Like EUV lithography machines, they cannot be bought even if you have money.

So although ASML's EUV lithography machine uses this solution, which can be regarded as pointing the direction for China, the challenges are even greater because of patent barriers and sales bans.

On the other hand, the DPP solution can avoid patent barriers and has greater prospects because it directly converts electrical energy into plasma energy. The light source structure is simple and it is relatively easy to increase the power as the technology matures.
  If the accelerator of the synchrotron radiation light source can be miniaturized, the DPP solution will also have greater application prospects.

This is also the main reason why Kangchi chose Chang Chunguang’s DPP solution.

After thoroughly studying Chang Chunguang's drawings and analyzing the difficulties and technical flaws they currently encountered, Kang Chi spent a few more days to improve the design of the plan, and then handed the hard drive to Chen Hai asked him to arrange for someone to be sent to Changchun.

When He Yong received the hard drive and learned that Kangchi had completed the improved design of the plan, he couldn't help but take out his mobile phone and confirm the date.

"It's only been ten days. Are you sure he understood the drawings?"

Lai Qinglei, who was in charge of delivering the drawings, shook his head: "Sorry, I'm just a delivery person. I don't know anything about the technical aspects, but I don't think Dr. Kang would make such a vulgar joke."

"Really?" He Yong sneered, "Why do I think he always likes to joke?"

After taking the hard drive, He Yong couldn't help but return to the office immediately and curiously opened the drawings inside to see whether Kang Chi's so-called improvement plan was true or false.

Opening the first overall structure diagram, He Yong could see at a glance that it was very different from their original design.

So, he really improved the design?
  And it only took him ten days from digesting the drawings to completing the improved design? !

Putting aside whether the improved plan would work or not, the efficiency alone made He Yong feel a little unbelievable.

After a brief moment of surprise, He Yong enlarged the design drawing, carefully analyzed the changes inside, and gradually began to frown.

"Magnetic field constraints?"

Looking at the twist-like lines wrapping the two electrodes, He Yong always felt as if he had seen a similar design structure somewhere...

He Yong, who didn't see anything special about it, tried to find the detailed exploded view of this twist-shaped structure based on Kang Chi's annotations on the overall structure diagram.

Then his eyes suddenly widened.

He finally knew where he was and had seen similar structures.

This is……

Stellarator!
  This structure looks too much like the magnetic field ring of a stellarator, an important technical route for controllable nuclear fusion!
  What are you kidding? !

We are building EUV light sources, not nuclear fusion! Even if you design the stellarator, can we build it by ourselves? !

When He Yong saw this picture for the first time, he thought it was too outrageous.

But after taking a second look, he soon discovered that although it looked like a stellarator, it was actually quite different from a stellarator.

The design of the stellarator is a perfect closed-loop magnetic field, but this one is obviously an open-loop, and the structure is relatively simple.

He Yong looked at the technical description of this picture again, and quickly understood the specific principles of Kangchi's improvement plan.

In the DPP-EUV solution, the biggest problem is that when ionizing tin, a large amount of tin debris will be produced.
  These debris are extremely hot and can easily corrode and contaminate electrodes and equipment.

Especially the reflectors that collect light,
  Once damaged, the efficiency of collecting light plummets.

Therefore, Kangchi used a magnetic confinement principle similar to that of a stellarator to create an invisible 'wind' to blow out the tin debris generated during the ionization process along the designed magnetic field route.

The idea is great, but is it possible?
  Let’s not talk about whether this strong magnetic field can be created. Even if it is created, will such a strong magnetic field cause interference to other parts of the equipment?

And in addition to this improvement in magnetic field cleaning debris, He Yong also discovered another crazier improvement of Kangchi next.

The tin was supposed to be applied to the electrodes;

But Kangchi added a nozzle directly in the middle of the electrode to heat the tin to 2260 degrees and turn it into gas and spray it out!
  The principle is actually a bit similar to that of a fuel engine. The fuel injector injects fuel, and then the spark plug ignites.
  The difference is that one burns and expands to do work, and the other ionizes and emits light.

This has the advantage that it can solve the problem of light source stability of repeated frequency discharge and at the same time easily increase the light source power.

But the premise of all this is whether the magnetic field design like a stellarator will work.

If the magnetic field design is not good, the entire device will be destroyed when the tin gas is sprayed out.

Thinking of this, He Yong immediately held a technical seminar and directly announced Kangchi's improvement plan at the meeting.

After seeing Kang Chi's plan and listening to He Yong's explanation, the entire conference room fell into silence for a long time.

Everyone was shocked by this bold and crazy plan.

And He Yong also gave them enough time to digest the information.

After a full three minutes, someone finally asked: "Is this... okay?"

"I don't know either." He Yong glanced at everyone and said,
  "Theoretically, this is indeed a direction, but whether it can be realized specifically requires simulation verification of this design theory... Lao Liao, you are better at magnetic fields, so I leave the magnetic field analysis to you."

Liao Yuan, whose name was called, nodded: "Give me two days."

He Yong immediately set his sights on another old man in his fifties: "Old Xu, come here and study the design drawings carefully to see how confident you are that it can be built."

Then He Yong gave up his position.

Lao Xu studied the drawings in front of the computer for more than half an hour, and finally nodded and said: "It shouldn't be a big problem."

"Although this looks like a stellarator, in fact its requirements are not so demanding. What the stellarator needs to control is nuclear fusion. Not only does it have extremely high magnetic requirements, but it also has to have no deviation at all. But this only requires about To control the direction of the magnetic field, the equipment precision requirements are lower and the volume is not too large.”

He Yong immediately felt relieved after hearing this.

Next, we wait for the results of the design theory simulation verification.

(End of this chapter)

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