Siheyuan: Starting from a fitter

Chapter 128 Lithography Machine

Although they are an old married couple, Zhao Ting is still a little uncomfortable with being too affectionate in front of Aunt Liu.On the other hand, Aunt Liu seemed to be unable to see what she was doing.

Zhao Ting specially opened a bottle of chrysanthemum white and filled it for all three of them.

"I wish you the results of your research as soon as possible." Zhao Ting raised her glass to send her blessings.

After drinking the second glass of wine, Zhao Ting raised it again.

"I wish our country will get out of the fog and the country will be prosperous and the people will be strong."

"I will definitely do it, and it will surprise you." Li Guocheng responded with a toast, and the three of them cheered again.

"Let me take care of the third glass of wine," Aunt Liu rushed to say, "I wish you love and many children and happiness."

Zhao Ting and Li Guocheng looked at each other and smiled, and their tacit understanding was evident in the wine.

The two of them have discussed not having children until they are 30 years old.While you are young, you should make more contributions to the country.

Li Guocheng was infected by the people around him, and now he is also a passionate young man. Sometimes he himself finds it incredible.

A good night's dream.

Three days later, Li Guocheng walked out quietly from the separate laboratory with an expressionless face. The three of them had already stood up and were about to run away. When they saw that there was no movement behind Li Guocheng, they stopped again and looked at him steadily.

As they walked beside them, Li Guocheng said softly: "It's done."

"what?"

"What did you say?"

"What is established?"

The three of them excitedly asked Li Guocheng for confirmation. They had been waiting for such a day for a long time, and they were thinking about this day even in their dreams.

"Photoresist and etchant." Li Guocheng paused for a while, and then said in a firm tone: "It's done."

"Long live!"

"My goodness!"

. . . . . . .

The three of them shouted while hugging Li Guocheng.I don’t know who shed tears first, but the other two soon followed suit.

Li Guocheng's eyes were also red, and he tried his best to restrain his tears.

Everyone was lively for a while, Li Guocheng said: "I said, you record."

The three of them quickly returned to their workstations, picked up their notebooks, and waited to record.

Next, Li Guocheng described today's various ratios and experimental characteristics, and highlighted the optimal ratio.

"Zhang Zhijing, Zhou Xiaojuan, follow the ratio I mentioned and complete the repeated experiment as soon as possible."

The three of them are already familiar with these verification tasks. In the past half month, they have been verifying the ratio and stability every day.Li Guocheng often systematically explained chemistry and physics knowledge to them during breaks, and they felt that their knowledge was gradually improving.

This made the three of them respect Li Guocheng even more.Not a master and a disciple, but better than a master and a disciple.

Now the two girls have long lost their previous emotional resentment. Now Yan Jiefang and Zhao Zhijing seem to have some feelings for each other. Zhou Xiaojuan has also found a partner. He is a regular worker in a supply and marketing cooperative. It is said that they will get married by the end of the year.

Li Guocheng called Yan Jiefang aside alone and asked about the situation of purple light projection.

"Brother Li, according to the method you mentioned, the current experiment of parallel irradiation of purple light onto the pickling mold and then shrinking the pickling mold pattern is very stable."

"Great, take me there to have a look."

In another corner of the laboratory, I saw a black iron one-way cover. Inside the cover was an approximately semicircular silver light reflective coating. A mercury lamp was installed inside the cover to produce parallel violet light.

In the middle is a pickled template carved by Li Guocheng, below is a lens group composed of three convex lenses, and at the bottom is a black wooden board.

Yan Jiefang confidently turned on the switch of the mercury lamp. At this time, a beam of purple light was projected on the black wooden board, with dots of fluorescence glowing on it, and a reduced figure appeared on the wooden board with very clear lines.

Li Guocheng was overjoyed and patted Yan Jiefang's shoulder hard.After scanning the three-dimensional image, the lampshade was removed, and with the help of mind power, the reflective layer inside was manually polished.

The convex lens is then precision polished.After the reinstallation was completed, I turned on my telekinesis and adjusted the focus until the graphic lines projected on the wooden board were the clearest, and then I recorded the size.

Li Guocheng took matters into his own hands and used the Sugon II machine tool to complete the manufacturing and installation of the first-generation lithography machine in two days.It is divided into upper and lower parts. The upper part is the purple light generation module and the mask plate mounting bracket, and the lower part is the base where the wafer can be installed. The size of the wafer installation is adjustable.

The upper part uses carving techniques on the shell to carve a mighty and domineering dragon, and the dragon's mouth is the projection port of purple light.A dragon claw serves as a mounting base for the pickled formwork.

The purple light part can move flatly on the base, and the movement accuracy exceeds 0.01mm, mainly because the highest measurement accuracy of the steel rolling mill is 0.01mm.

Although the entire lithography machine is simple, it can meet the requirements of industrial production.Li Guocheng believes that this is the most advanced and beautiful lithography machine in the world.

The photolithography machine was thoroughly cleaned using a fan, and Li Guocheng and Yan Jiefang took it to the newly built dust-free workshop.After changing clothes, blowing hair, etc., enter the workshop.

Fix the lithography machine to a specially set aside workbench, power on, recheck and adjust, and then leave the workshop.

At this time, the dust-free workshop was isolated into three spaces, namely the wafer preparation room, the photolithography room and the post-production workshop.They are separated by large pieces of double glazing.The sizes are 200 square meters, 300 square meters and 500 square meters respectively.

The wafer preparation room is equipped with a vacuum pulling furnace, a slicer and a grinder.The photolithography room is equipped with a vacuum oxidation furnace, vacuum diffusion furnace, photolithography machine and etching machine.

The etching machine consists of three anti-corrosion chambers. The first two chambers are used to etch the wafer, and the rear one stores cleaning fluid.It is said to be an etching machine, but in fact the entire process is manually operated.Move the wafer from one liquid tank to another.

Only the main body of all vacuum furnaces is in the workshop, and the other parts are placed in an equipment room outside the dust-free workshop. There is a glass window between them. Through this window, workers in the dust-free workshop can instruct workers in the equipment room to start and stop each vacuum furnace. .

The later workshop mainly completes chip cutting, optical inspection, packaging and testing.There are four rows of workbenches, which can accommodate a total of 50 people working at the same time. There are storage cabinets against the wall.

Li Guocheng was personally involved in almost all the equipment in the three workshops, or at least assembled it by himself.All workshops are brightly lit and very open, so no one will affect anyone else when workers are operating.

Now everything is ready and all we need is Dongfeng, and Dongfeng is in the process of verification. If the verification is passed, it must meet the conditions for industrial production.

A week later, all verification work was completed and sufficient photoresist and etchant were prepared.

A new day, at 8:30 in the morning, there are several people standing in the clean room at this time, Li Huaide, Wu Liankui, Wang Gong, Master Yi, Zhang Tou, Zhang Zhijing, Zhou Xiaojuan, Yan Jiefang, Tang Danian, Wang Dayong and the three undeserving The name of the seven-level fitter.

Li Guocheng is making final adjustments in the photolithography room.Everyone stood in front of the glass, no one wanted to sit down, and they all stared at Li Guocheng's operation.

Half an hour later, Li Guocheng turned around and gave everyone an ok gesture. Although some people didn't know the specific meaning, they all understood that the equipment was normal.

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(End of this chapter)