Civilization Template

Chapter 98 Deep Silicon Etch Process
"Oh? What sensors are there?"

Director Sun sat up straight.

"So far, the idea has been mature. In addition to the acceleration sensor shown last time, simpler pressure sensors, level sensors, and altitude sensors and airspeed sensors that will be used on aircraft"

Chen Quan wrote down a long list of names on the blackboard.

Now that he understands that what "he" does are all sensors, it is much easier to find the purpose of those more than 20 experiments.Although there are some very complicated structures, Chen Quan still can't figure it out, but many of them can actually have multiple uses.

Not to mention, "he" provides several general structures.

Therefore, some sensors were originally included in "his" experiment, but there are also many that were expanded by Chen Quan after discussing with Zhao Weiwei.Once the principle is clarified, it is easy to infer other cases from one instance.

"There is also a gyroscope with a more complex structure. This can be used as the finale of our first phase of work."

"Gyroscope? Can gyroscopes also be processed with MEMS technology?"

The middle-aged man beside Dean Liu stood up.

The gyroscope is the core sensor in many occasions.

"you are?"

Director Sun turned around and asked.

"I came with Lao Liu, you can call me Wang Gong." The middle-aged man did not reveal his name, and the others glanced at each other and stopped asking.

"You haven't answered my question yet, boy!"

"Oh. Of course. Since the shape of the gyroscope is too complicated, I also brought its model."

As soon as Chen Quan waved his hand, Qu Yanqiu walked up to the podium holding a set of crude samples made of paper shells.
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Microelectronics Laboratory.

"Why are your hands shaking? This wafer is useless!"

Zhang Dong was trembling with anger. "Do you know how much this wafer is worth? Including the various potions and preparations that were consumed just now, it's one hundred yuan! Just shake it, it's gone!"

"It's not completely useless. Isn't the other half still usable?"

Cheng Xing, who knew he had made a big mistake, tried to distinguish.

In Bingcheng in 1989, the living expenses of students were 50 yuan a month, and 100 yuan was enough to eat well.

"Oh my God! I've had enough."

Zhang Dong's patience was completely gone. "Whose idea came up with this! Let these freshmen who haven't even attended class do semiconductor experiments?"

"Old Zhang, be patient."

The scientific researchers who were doing experiments on the nearby workbench were persuading while operating. "You can't expect everyone to be like Chen Quan, you can understand it at a glance, and you can understand it as soon as you hear it."

"Teacher, let's go in groups of two. Let's be careful this time."

Yun Li took a step forward.

With the step down, Zhang Dong's attitude improved a bit. "Okay, you are in a group with Cheng Xing, and Yu Yaoying is in a group with Li Ji. The rest of Feng Yan is in a group by yourself."

Cheng Xing, who was blushed by the training, glanced gratefully at the unremarkable girl in the same class beside him.

In the MEMS group, although there are not many people, they are divided into several factions.

Yu Yaoying and Li Ji are both direct descendants of Chen Quan and Qu Yanqiu, and Feng Yan is the god-sister of Chen Quan and Qu Yanqiu. The Chinese summary published a few days ago was signed by him, and he is in a good mood.

As for Yun Li and Cheng Xing, they were pulled into the group without knowing the reason behind it, so they were quite nervous, and they were a little timid in doing things.

Due to the similar situation, the two of them have been huddling together to keep warm recently.
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meeting room.

Seeing the samples, interested guests left their seats and surrounded them.

"That's not right."

Wang Gong went up and down to see the sample thoroughly.

"What's wrong?"

Bingfei's Chief Engineer Zhou is by his side.

"This kind of structure, with the current MEMS technology, can't be processed at all."

Wang Gong lifted the model up until it was at eye level. "I remember that the sacrificial layer technology used in MEMS cannot process such a high aspect ratio and high verticality at all."

Sacrificial layer technology (process) was introduced into the field of semiconductor processing in 1985, and the concept of "surface" micromachining was born.The reason why the world-shocking micro-electrostatic motor was released in 1988 is thanks to the sacrificial layer technology.

Most people did not understand Wang Gong's professional evaluation, but it did not prevent everyone from turning their attention to Chen Quan and waiting for an explanation.

"Yes. This gyroscope, I'm not going to use only the sacrificial layer process."

Chen Quan didn't panic at all.

In memory, the processing technology used by the gyroscope has indeed changed.

The reason why Chen Quan wants to throw out a new paper has something to do with the accelerometer paper being adopted by Applied Physics Letters.

Applied Physics Letters, in the semiconductor process series, is considered to be the best wave of journals among journals related to MEMS.Its SCI impact factor exceeds 4.

(The real MEMS professional journal has not yet appeared.)
It stands to reason that it is a great thing for the paper to be accepted, but Chen Quan and Qu Yanqiu couldn't sit still.Because neither he nor she felt anything.

Chen Quan and Qu Yanqiu could clearly see or feel some differences in the previous two passes.

For example, Qu Yanqiu was physically activated for the first pass, but for the second time, she simply woke up.But now, no news is the worst news.

Therefore, the two of them had to continue to raise their psychological goals and raise the level of the thesis to a higher level.

The goal this time is to focus on CNS (CELL, SCIENCE, NATURE), these three top-notch journals, and get him in place at one time.

In the late 80s, there were not many such super-first-class journal papers. As long as there was one article, it could establish a school in China, directly establish a dedicated laboratory, or even a new specialty.

This gyroscope, and the technical thesis behind it, are the targets carefully selected by Chen Quan and Qu Yanqiu.

"Isn't it the sacrificial layer process? Are there other processes? Why haven't I heard of it?"

Wang Gong narrowed his eyes, and looked at the unbelievably young man in front of him again.

"Well, let's say it's my invention. It's the one I want to apply for a patent this time."

In the initial stage of an international patent application, the cost is not too much. If you pay a registration fee of 800 to 12 US dollars, you can have an exclusive period of 18 to [-] months.Without this time difference, the MEMS project team cannot afford the patent application for the acceleration sensor.

"What's the name of this craft?"

"Well, call"

Chen Quan scratched his head.

All memories are image memories, names and so on, never.

"I haven't given it a name yet. Or call it a deep silicon etch process."

Chen Quan casually named it according to his intuition.After saying the name, I feel pretty good.

"Deep silicon etch process? What's that?"

Wang Gong was puzzled. "Can you explain to me how this craft is realized?"

"It is possible, but this is the real core technology."

Chen Quan was very embarrassed, looking around, his face full of worry.

"Wang Gong, don't be hard on yourself."

Lin Shuqiang ran over to help.

"Ha, boy, you underestimate me."

Wang Gong suddenly shook his body and straightened his body. "As long as you can convince me that the set of gyroscopes in front of me can be realized, with 200 million sponsorship funds, our aviation academy will come out!"

"Your aviation academy is out?"

Chen Quan was dumbfounded.

Not only Chen Quan was dumbfounded, but everyone else was also dumbfounded.

Huang Chuxiong was dumbfounded, Zhao Liangcai was dumbfounded, and even Lin Shuqiang was dumbfounded.

As the principal, he didn't even know that the aviation academy below was so rich?
Dean Liu of the aviation academy was also dumbfounded.

Where is the money in the aviation academy!
But he didn't say anything, and continued to watch the fun.

"Shall we talk alone?"

Zhao Liangcai was the first to reflect.This Wang Gong, as the guest of the director of the aviation academy, has already revealed his identity.

"it is good."

The middle-aged man surnamed Wang made a move directly, hugged the model on the podium, and put it in his arms. "let's go?"

"Wait, wait! Wait a minute!"

Factory Director Sun, who was watching the excitement, stood up happily. "Why do I feel something is wrong? Isn't the theme of today's meeting for us to review the project by Bingfei? Why is the meeting adjourned now?"

(End of this chapter)